Fully Automatic Visual AOI Inspection Machine

The fully automatic wafer appearance inspection machine is mainly suitable for detecting defects in wafer appearance, aiming to improve customer production efficiency; it is applicable for 4 inch, 6 inch, and 8 inch wafers.

Product Description

Product Features:

• Detection supports simultaneous measurement of line width and etching measurement in one.

• Surface defect detection capability can reach 0.3um.

• Automatic detection without manual intervention, single machine defect detection mode.

• Flexible and efficient multi-method defect and automatic defect classification.

• Single-layer and multi-layer graphic detection, as well as custom area detection.

• High-precision line width measurement and etching size measurement system.

• Automatic script programming capability and automated operation.

• Comes with an automatic detection material box function, has mapping capability, and can perform double-sided detection.

• Wafer robotic arm completes wafer operation within the equipment; JEL/self-laser autonomous robotic arm.

 

Product Applications:

Fully automatic wafer appearance inspection machine is mainly suitable for detecting wafer appearance defects to improve customer production efficiency; suitable for 4inch, 6inch, 8inch wafers.

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